Title:
JOINT AND GAS EVAPORATION SUPPLY SYSTEM INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2018168872
Kind Code:
A
Abstract:
To provide a joint provided at a terminal of a carrier gas supply unit, which can be simply connected to a resin check valve and suppress occurrence of ultra-minute particles due to corrosion, and provide a gas evaporation supply system including the joint.SOLUTION: A joint A1 is provided at a terminal of a carrier gas supply unit 12 of a gas evaporation supply system 10, the gas evaporation supply system configured to supply carrier gas into a liquid tank LT having a corrosive material LI to evaporate the material LI to supply the material LI evaporated together with carrier gas. The joint A1 includes a body part 30 having an inflow port 33 for carrier gas, a connection part 36 having an outflow port 37 for carrier gas and projecting from the body part 30, and an external screw part 39A formed at an outer peripheral surface on a tip side of the connection part 36.SELECTED DRAWING: Figure 3
Inventors:
HAYASAKA YUKI
DOYA HIDEHIRO
DOYA HIDEHIRO
Application Number:
JP2017064605A
Publication Date:
November 01, 2018
Filing Date:
March 29, 2017
Export Citation:
Assignee:
FUJIKIN KK
International Classes:
F16L19/10; F16K27/00; F16L19/065
Attorney, Agent or Firm:
Tomohiro Sakamoto
Toshihiro Oishi
Ayumi Yada
Toshihiro Oishi
Ayumi Yada