Title:
JOINT
Document Type and Number:
Japanese Patent JP2016109186
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a joint of a double pipe capable of downsizing an applied device.SOLUTION: A joint for connecting a double pipe to a connected portion, includes: an inner pipe which forms a channel of a processing fluid; an outer pipe 46 which surrounds the inner pipe through a liquid passing space 48A; and a partitioning portion which partitions the liquid passing space into plural parts in a circumferential direction, and forms a first liquid passing space and a second liquid passing space on the outside of the inner pipe. The joint is equipped with a channel forming portion which is fitted with the inner pipe and forms a channel communicating with the channel of the processing fluid; and a first opening and a second opening provided at a part on a front end side opposite to an end portion of the double pipe, and independently connected to the first liquid passing space and the second liquid passing space.SELECTED DRAWING: Figure 6
Inventors:
OKAMOTO YOSHIKI
Application Number:
JP2014245915A
Publication Date:
June 20, 2016
Filing Date:
December 04, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F16L39/00; F28D7/10
Domestic Patent References:
| JPH04231969A | 1992-08-20 | |||
| JPS62113984A | 1987-05-25 | |||
| JPH04210185A | 1992-07-31 | |||
| JPS57175887A | 1982-10-28 | |||
| JPS55107888A | 1980-08-19 | |||
| JPS54102524U | 1979-07-19 | |||
| JPH0228968U | 1990-02-23 | |||
| JP2003301985A | 2003-10-24 | |||
| JP2003297788A | 2003-10-17 |
Foreign References:
| US5063994A | 1991-11-12 | |||
| US20090025902A1 | 2009-01-29 | |||
| US6086114A | 2000-07-11 |
Attorney, Agent or Firm:
Toshio Inoue
Tomoaki Miida
Tomoaki Miida
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