Title:
JOSEPHSON DEVICE
Document Type and Number:
Japanese Patent JPS63283176
Kind Code:
A
Abstract:
PURPOSE:To obtain a Josephson device having uniform characteristics without decrease in the critical temperature of a bridge by introducing at least one of lattice defects to an impurity to part of the surface layer of a thin superconducting film to form a defect section, and forming a bridge to a substrate. CONSTITUTION:A striplike Nb thin superconducting film 12 is formed on a glass substrate 10. A mask 16 having a slit 15 laterally of a thin superconducting film is formed by a photocomposing method. A defect section 13 is formed by O<+> ion implanting, and a bridge 14 is formed between its lower end and the substrate 10. The thickness of the bridge 14 is regulated by controlling an ion accelerating voltage and the depth of the defect section 13. Or, only the lattice defect may be introduced by irradiating it with a focused electron beam to form the section 13. According to this configuration, the irregularity of the device characteristics is suppressed to improve its yield. The decrease in the critical temperature of the bridge is eliminated to obviate the narrowing of the using temperature of the device.
Inventors:
TANABE NOBUO
NAKAGAWA MIKIO
KONO TSUKASA
IKENO YOSHIMITSU
SADAKATA NOBUYUKI
SUGIMOTO MASARU
NAKAGAWA MIKIO
KONO TSUKASA
IKENO YOSHIMITSU
SADAKATA NOBUYUKI
SUGIMOTO MASARU
Application Number:
JP11862687A
Publication Date:
November 21, 1988
Filing Date:
May 15, 1987
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
H01L39/22; (IPC1-7): H01L39/22
Attorney, Agent or Firm:
Masatake Shiga