Title:
CVD加熱用のLED加熱ランプアレイ
Document Type and Number:
Japanese Patent JP4486885
Kind Code:
B2
Abstract:
A reactor chamber is positioned between a top array of LED heat lamps and a bottom array of LED heat lamps. The LED heat lamps forming the top and bottom arrays are individually or controllable in groups such that power output along each array of LED heat lamps can dynamically differ. The LED lamps can be controlled in response to, for example, feedback from chamber sensors, a desired temperature profile, and a failed LED lamp. In this way, the methods and systems described herein can dynamically compensate for operational characteristics of the reactor chamber. In one configuration, the LED heat lamps are arranged in a rectangular pattern. In some configurations, the LED heat lamps are arranged in a circular or a concentric pattern.
Inventors:
Putac Johnsea.
Application Number:
JP2004527614A
Publication Date:
June 23, 2010
Filing Date:
July 18, 2003
Export Citation:
Assignee:
ASM America Inc.
International Classes:
C23C16/46; H01L21/205; F27B5/14; F27B17/00; F27D11/00; F27D11/02; F27D19/00; F27D21/00; H01L21/00; H01L21/26
Domestic Patent References:
JP2002141294A | ||||
JP3500549A | ||||
JP2002318364A | ||||
JP10229112A |
Attorney, Agent or Firm:
Fumihiko Yagisawa
Suzuki Masao
Suzuki Masao