Title:
ラクトン化合物、ラクトン含有単量体、高分子化合物、それを用いたレジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4683887
Kind Code:
B2
Abstract:
The present invention relates to novel first to fourth lactone compounds. The first lactone compound is represented by the formula (1),
in the formula, X represents CH 2 , CH 2 CH 2 , O, S or NR 1 , and R 1 represents hydrogen atom, a straight-chain, branched or cyclic alkyl group of a carbon number of 1-10. Hydrogen(s) of the alkyl group may partially or entirely be replaced with fluorine atom(s). Furthermore, a part of the alkyl group may contain an atomic group containing oxygen atom, sulfur atom, nitrogen atom, carbon-carbon double bond, carbonyl group, hydroxy group or carboxyl group.
Inventors:
Shinichi Tsunoda
Haruhiko Komoriya
Katsutoshi Suzuki
Kazuhiko Maeda
Haruhiko Komoriya
Katsutoshi Suzuki
Kazuhiko Maeda
Application Number:
JP2004266071A
Publication Date:
May 18, 2011
Filing Date:
September 13, 2004
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C07D311/94; C08F20/28; G03F7/039; H01L21/027
Domestic Patent References:
| JP2002162745A | ||||
| JP2003002882A | ||||
| JP2004175981A | ||||
| JP2003005374A |
Other References:
Chemistry & Industry, (1981), (19), 693-694
Attorney, Agent or Firm:
Makoto Koide