Title:
積層体の製造方法および基板の処理方法
Document Type and Number:
Japanese Patent JP6606406
Kind Code:
B2
Inventors:
Akihiko Nakamura
Yoshihiro Inao
Yoshihiro Inao
Application Number:
JP2015221625A
Publication Date:
November 13, 2019
Filing Date:
November 11, 2015
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
H01L21/02
Domestic Patent References:
| JP2013008915A | ||||
| JP2015116667A | ||||
| JP2006032815A | ||||
| JP2010287816A | ||||
| JP2004148382A | ||||
| JP2008226341A | ||||
| JP2005267804A | ||||
| JP2015098565A | ||||
| JP60185233A |
Foreign References:
| WO2008059571A1 |
Attorney, Agent or Firm:
Harakenzo world patent & trademark