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Title:
LAMINATE POLISHING PAD
Document Type and Number:
Japanese Patent JP2012106328
Kind Code:
A
Abstract:

To provide a laminate polishing pad in which a polishing layer and a cushion layer are hardly peeled off from each other.

The laminate polishing pad comprises a polishing layer having no transfixing region and a cushion layer which are laminated via an adhesion member. In the laminate polishing pad, on the back surface of the polishing layer, at least one non-adhesive region X is formed which is continuous from the center area to the outer peripheral edge of the polishing layer, and/or in the adhesion member, at least one non-adhesive area Y is formed which is continuous from the center area to the outer peripheral edge of the adhesive member.


Inventors:
KAZUNO ATSUSHI
Application Number:
JP2011044192A
Publication Date:
June 07, 2012
Filing Date:
March 01, 2011
Export Citation:
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Assignee:
TOYO TIRE & RUBBER CO
International Classes:
B24B37/22; B24B37/26; H01L21/304
Domestic Patent References:
JP2005056920A2005-03-03
JPH08108372A1996-04-30
JP2009224384A2009-10-01
JP2009095945A2009-05-07
Foreign References:
WO2008114520A12008-09-25
WO2003054097A12003-07-03
US20070072526A12007-03-29
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office