Title:
LAMINATE POLISHING PAD
Document Type and Number:
Japanese Patent JP2012106328
Kind Code:
A
Abstract:
To provide a laminate polishing pad in which a polishing layer and a cushion layer are hardly peeled off from each other.
The laminate polishing pad comprises a polishing layer having no transfixing region and a cushion layer which are laminated via an adhesion member. In the laminate polishing pad, on the back surface of the polishing layer, at least one non-adhesive region X is formed which is continuous from the center area to the outer peripheral edge of the polishing layer, and/or in the adhesion member, at least one non-adhesive area Y is formed which is continuous from the center area to the outer peripheral edge of the adhesive member.
Inventors:
KAZUNO ATSUSHI
Application Number:
JP2011044192A
Publication Date:
June 07, 2012
Filing Date:
March 01, 2011
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO
International Classes:
B24B37/22; B24B37/26; H01L21/304
Domestic Patent References:
JP2005056920A | 2005-03-03 | |||
JPH08108372A | 1996-04-30 | |||
JP2009224384A | 2009-10-01 | |||
JP2009095945A | 2009-05-07 |
Foreign References:
WO2008114520A1 | 2008-09-25 | |||
WO2003054097A1 | 2003-07-03 | |||
US20070072526A1 | 2007-03-29 |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office
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