Title:
LAMINATE FOR SEALING BARRIER LAYERS
Document Type and Number:
Japanese Patent JP2021073691
Kind Code:
A
Abstract:
To provide a processing device for preventing an environmental configuration element from impregnating between the device and an external environment by sealing the device.SOLUTION: By coating a plurality of barrier layers 630, 640, 650 to a device 600, and individually cleaning a surface of a device which is currently exposed in advance to the coating of each barrier layer, the device will contain a sealing lamination body 670. The sealing lamination body contains a multilayer lamination body made of each barrier layer. By performing individual cleaning, a particle is removed from the surface of the device which is currently exposed, a gap in each barrier layer formed by the particle is made exposed, and the gap is at least partially sealed with each barrier layer continuously coated to prevent an implantation route from penetrating a gap space and to prevent the sealing lamination body from penetrating. The number of barrier layers to be coated for forming the lamination body can be determined on the basis of determination probability at which the lamination body formed of a predetermined number of barrier layers does not depend on a predetermined number of continuous implantation routes or more, penetrating the lamination body.SELECTED DRAWING: Figure 6
Inventors:
AVANTI M JAIN
JEAN-CHRISTOPHE GIRON
JEAN-CHRISTOPHE GIRON
Application Number:
JP2021000215A
Publication Date:
May 13, 2021
Filing Date:
January 04, 2021
Export Citation:
Assignee:
SAGE ELECTROCHROMICS INC
International Classes:
H01L23/29; G02F1/15; G02F1/161; G03B9/02; G09F9/30; H01L23/31; H01L31/048; H01L51/50; H05B33/04; H05B33/10
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Satoshi Kinoshita
Nishikawa Keio
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Satoshi Kinoshita
Nishikawa Keio