Title:
積層基板の測定方法
Document Type and Number:
Japanese Patent JP6964517
Kind Code:
B2
Abstract:
A measurement method for a laminate substrate is provided. The laminate substrate has: a base substrate; an absorption layer; and a measurement-target layer in this order. The measurement-target layer has a single measurement-target monolayer or a plurality of measurement-target monolayers. The method includes: emitting incident light including light with a wavelength shorter than a threshold wavelength from a side on which the measurement-target layer is positioned, and measuring reflected light and acquiring mutually independent 2n (n is a layer count of the measurement-target monolayers included in the measurement-target layer and is an integer equal to one or larger) or more reflected light-related values for wavelengths equal to the threshold wavelength or shorter; and calculating values related to the measurement-target monolayers for each measurement-target monolayer included in the measurement-target layer using the 2n or more reflected light-related values.
Inventors:
Daiki Yamamoto
Kenji Kasahara
Takeshi Yamamoto
Kenji Kasahara
Takeshi Yamamoto
Application Number:
JP2017509926A
Publication Date:
November 10, 2021
Filing Date:
March 25, 2016
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G01N21/21; G01B11/06; H01L21/66
Domestic Patent References:
| JP2003090710A | ||||
| JP2006349374A | ||||
| JP2014063982A | ||||
| JP2014090033A | ||||
| JP2013207274A | ||||
| JP2014110311A | ||||
| JP2014140024A | ||||
| JP2014236017A | ||||
| JP2006093633A |
Foreign References:
| WO2014024310A1 | ||||
| US6392756 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation
Shigenori Hayashi
Shigenori Hayashi
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