Title:
LAMINATED PIEZOELECTRIC ACTUATOR AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3850163
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a laminated piezoelectric actuator which is enhanced in reliability by a method wherein piezoelectric plates and metal sheets are surely bonded together, and cracking is prevented from occurring in the piezoelectric plates.
SOLUTION: A laminated piezoelectric actuator is manufactured through a method where ceramic piezoelectric plates 1 and metal sheet 2 which are each formed of alloy such as covar whose main component is Ni-Fe and coated with an Ag metal layer 4 of thickness 1 to 20 μm formed on its both surfaces are alternately laminated, and the laminate is thermocompressed at a temperature of 400 to 700°C under a load of 700 to 2000 kgf, by which the Ag metal layer 4 is pressed into crystal grain boundaries of the surface of the ceramic piezoelectric plate 1, and the ceramic piezoelectric plate 1 and the metal sheet 2 are bonded together into one piece through the intermediary of the Ag metal layer 4.
Inventors:
Go Setoguchi
Yuki Ashida
Higashi Beppu Makoto
Tomohiro Kawamoto
Katsuhiko Onizuka
Yuki Ashida
Higashi Beppu Makoto
Tomohiro Kawamoto
Katsuhiko Onizuka
Application Number:
JP5026299A
Publication Date:
November 29, 2006
Filing Date:
February 26, 1999
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L41/083; F02M51/00; H01L41/22; H01L41/277; H01L41/297; H02N2/00; (IPC1-7): H01L41/083; F02M51/00; H01L41/22; H02N2/00
Domestic Patent References:
| JP62165381A | ||||
| JP6062700U | ||||
| JP10190081A | ||||
| JP9292284A |