Title:
LAMINATED POLYESTER FILM FOR DRY FILM RESIST
Document Type and Number:
Japanese Patent JP2005059285
Kind Code:
A
Abstract:
To provide a polyester film of high quality for a dry film resist excellent in resolving power and preventing the occurrence of the flaw of an image.
The laminated polyester film for the dry film resist is a biaxially oriented laminated polyester film characterized in that at least the outermost layer on one side thereof contains 100-2,000 ppm of crosslinked polymer particles with a mean particle size of 0.1-1.0 μm and 10-500 ppm of silica particles with a mean particle size of 0.1-3.0 μm. The surface roughness Ra of the outermost layer is 0.005-0.020 μm, the surface roughness Rt thereof is 0.50 μm or below and film haze is 2.0% or below.
Inventors:
TANAKA YOSHIKAZU
IWASAKI YUJI
KAWAGUCHI CHIKAKAZU
YONEDA ISAO
IWASAKI YUJI
KAWAGUCHI CHIKAKAZU
YONEDA ISAO
Application Number:
JP2003290206A
Publication Date:
March 10, 2005
Filing Date:
August 08, 2003
Export Citation:
Assignee:
MITSUBISHI POLYESTER FILM CORP
International Classes:
G03F7/004; B32B27/36; G03F7/09; (IPC1-7): B32B27/36; G03F7/004; G03F7/09