To provide a laminating apparatus capable of forming an air pressing pattern with which air bubbles on a contact surface generated during a laminating process can be removed, and its laminating method.

The laminating apparatus includes a carrier device and a positive pressure pressing device. The carrier device accommodates substrates to be worked and forms a vacuum to fix and pressure-bond the substrates with one another. The positive pressure pressing device jets air toward an elastic film of the carrier device to strengthen an adhesive force between the substrates and concurrently removes the air bubbles between the substrates which may occur during the laminating process by bringing an effect as if the jetted air swept the substrate out from the center. Since pressurization by such air pressing causes the substrate or the like to be stored in another transferrable carrier device instead of a chamber, the positive pressure pressing device can perform repeated air pressing steps for a plurality of carrier devices.