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Patent Searching and Data


Title:
LAMP ANNEALING APPARATUS
Document Type and Number:
Japanese Patent JPH02268423
Kind Code:
A
Abstract:

PURPOSE: To suppress variations in temperature and lamp output by inputting output signal of temperature detecting means to the PID control circuit of a controller through a phase advance compensator.

CONSTITUTION: The output of a temperature detector 2 is input to the phase advancing circuit 12 of a controller 10 through an A/D converter 4. The circuit 12 compares a measured temperature with a target temperature, and a transfer advance is compensated. Its output is input to a PID control circuit 11, PID calculation is performed based on the compensated temperature measured value to obtain a control amount of a lamp 1. The output controls the lamp 1 through a D/A converter 7 and a thyristor 8.


Inventors:
TOUZU HIDEKI
Application Number:
JP9158589A
Publication Date:
November 02, 1990
Filing Date:
April 10, 1989
Export Citation:
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Assignee:
KOYO SEIKO CO
International Classes:
H05B41/392; F27B17/00; H01L21/26; (IPC1-7): F27B17/00; H01L21/26; H05B41/392
Attorney, Agent or Firm:
Eisuke Kishimoto (3 others)