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Patent Searching and Data


Title:
LAMP ANNEALING DEVICE
Document Type and Number:
Japanese Patent JPH03218624
Kind Code:
A
Abstract:

PURPOSE: To minimize the distribution of temperature in respective parts of a heated material during the infrared ray lamp heating time by a method wherein a means of setting doses imparted by respective infrared ray lamps opposite to respective parts is provided so as to supplement the doeses corresponding to the heat dissipation characteristics of the respective parts of the heated material.

CONSTITUTION: Respective halogen lamps 1 are fixed to differentiate the arrangement directions of filaments so that the illuminance distribution may be complemented by one another. The halogen lamps 1 arranged in such a mode are connected to an external does setting device 3 by wirings passing through the wall of the device housing H. Next, the device 3 is to set the does of the infrared ray lamps 1 oppositely arranged so that the heat dissipation level of respective parts of a heated material may be complemented corresponding to the heat dissipation characteristics of the respective parts. Through these procedures, the temperatures of the respective parts can be made uniform thereby enabling the resultant temperature difference to be minimized.


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Inventors:
KIMURA MINORU
ITO MASAATSU
TAKEDA SHIGERU
HIROSE SHOJI
Application Number:
JP2687190A
Publication Date:
September 26, 1991
Filing Date:
February 06, 1990
Export Citation:
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Assignee:
NIPPON SOKEN
International Classes:
H05B3/10; F21S8/04; H01J5/50; H01K7/00; H01L21/20; H01L21/26; (IPC1-7): H01L21/20; H01L21/26
Attorney, Agent or Firm:
Ito Juma