Title:
ランプ加熱装置
Document Type and Number:
Japanese Patent JP6482334
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To allow for quick follow-up of the temperature of an object to be processed to a target value, without requiring the work of fine adjustment of the control parameters, and the like.SOLUTION: A control section 5 includes a target value setting section 51, a temperature controller 52 and a light controller 53. The target value setting section 51 sets the target temperature of an object to be processed W over time, in accordance with a prestored sequence. The temperature controller 52 outputs the light control amount to be emitted toward the object to be processed W from a halogen lamp 2, based on the difference between the current temperature and target temperature of the object to be processed W. The light controller 53 determines the power control amount to be supplied to the halogen lamp 2, based on the difference between the current amount of light of the halogen lamp 2 and the light control amount.SELECTED DRAWING: Figure 4
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Inventors:
Masaru Hattori
Application Number:
JP2015049687A
Publication Date:
March 13, 2019
Filing Date:
March 12, 2015
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
H05B3/00; C23C16/46; G05B11/36; H01L31/0224
Domestic Patent References:
| JP2001244212A | ||||
| JP2002367914A | ||||
| JP2003173983A | ||||
| JP5054960A |
Attorney, Agent or Firm:
Kaede International Patent Office