Title:
ランプ保持用カセット、およびそれを用いた露光装置用光源
Document Type and Number:
Japanese Patent JP7253798
Kind Code:
B2
Abstract:
The present invention is to provide a lamp holding cassette wherein, even when a plurality of lamps are densely arranged with each other, a nearby lamp or a wiring to the lamp is difficult to interfere, thereby facilitating the installation of the lamp to reduce the concern that the lamp cannot be mounted in an appropriate position. The lamp holding cassette (10) is composed of at least a first main body part (12) and a second main body part (14), and a plurality of lamp mounting recessed parts (20) in which a plurality of lamps (L) are mounted are formed in the first main body part (12) and the second main body part (14), and a first side surface (26) of the first main body part (12) is combined with a second side surface (28) of the second body part (14) to enable bonding to each other.
Inventors:
Hiroshi Matsumoto
Application Number:
JP2019208327A
Publication Date:
April 07, 2023
Filing Date:
November 18, 2019
Export Citation:
Assignee:
Phoenix Electric Co., Ltd.
International Classes:
G03F7/20
Domestic Patent References:
| JP2010256531A | ||||
| JP2011206731A | ||||
| JP2017037336A |
Foreign References:
| WO2014104013A1 |
Attorney, Agent or Firm:
Yuji Tada