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Patent Searching and Data


Title:
LARGE PELLICLE
Document Type and Number:
Japanese Patent JP2006146085
Kind Code:
A
Abstract:

To provide a large pellicle in which a pellicle can be removed from an exposure original plate without using a solvent or the like and without causing cohesion failure of a pressure-sensitive adhesive.

The pellicle comprises a rectangular pellicle frame having an upper end face and a lower end face and over 30 cm length in one side, a pellicle film stretched over the upper end face of the pellicle frame, and a pressure-sensitive adhesive layer on the lower end face to adhere the pellicle frame to an exposure original plate. The pressure-sensitive adhesive layer has a certain level of cohesion fracture strength not to induce cohesion failure in the pressure-sensitive adhesive layer when the pressure-sensitive adhesive layer is stripped from the pellicle frame or from the exposure original plate.


Inventors:
HAMADA YUICHI
Application Number:
JP2004339585A
Publication Date:
June 08, 2006
Filing Date:
November 24, 2004
Export Citation:
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Assignee:
SHINETSU CHEMICAL CO
International Classes:
G03F1/62; H01L21/027
Attorney, Agent or Firm:
Yasuhiro Noguchi