Title:
LARGE SIZED CERAMIC SURFACE PLATE AND XY STAGE DEVICE
Document Type and Number:
Japanese Patent JP2007075965
Kind Code:
A
Abstract:
To provide a large sized ceramic surface plate which reduces the weight even if it is the large surface plate and an XY stage device using it.
The large sized ceramic surface plate 10 is composed of: a crossbeam 13 which supports a ceramic plain plate 11 by joining at least two or more ceramic plain plate 11 made of a ceramic material to abut to a ceramic plain plate joining body 12 and the joining part of the ceramic plain plate joining body 12; and the ceramic plain plate 11 so as to cover the space of at least four corners at the other end surface side of the crossbeam 13. The large sized ceramic surface plate is extremely precise, is reduced in weight, and responds to the enlargement of the ceramic surface plate.
Inventors:
TSUNODA HIDEO
TAZANE YOICHI
KATO HITOSHI
UENO DAIJI
KONDO MASARU
TAZANE YOICHI
KATO HITOSHI
UENO DAIJI
KONDO MASARU
Application Number:
JP2005268956A
Publication Date:
March 29, 2007
Filing Date:
September 15, 2005
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
B25H7/02; C04B35/14
Attorney, Agent or Firm:
Hiroaki Sakai