To provide a laser apparatus of high luminance which is suitable to be used as a laser light source of an exposure apparatus for exposing the objective exposure face of a photosensitive material or the like to a light beam spatially modulated by a spatial optical modulation element in accordance with image data and which can emit laser beam of high luminance necessary to make the performance of the exposure apparatus highly accurate.
The laser apparatus is equipped with: a plurality of laser modules 64 in which a laser beam emitting from the laser element is condensed by a condensing optical system and is made to enter the entrance end of an optical fiber 30; and a laser exiting part 68 prepared by bundling the exiting ends of the optical fibers 30. The clad thickness h in each optical fiber 30 is controlled to equal to or smaller than the calculated value according to formula (1), so that the laser apparatus can emit a laser beam with high luminance necessary as the performance of the laser beam source to increase the resolution of the exposure apparatus.
YAMANAKA HIDEO
OKAZAKI YOJI
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda
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