Title:
単体の帯域幅制限装置を使用するレーザー組立体および検査システム
Document Type and Number:
Japanese Patent JP6775494
Kind Code:
B2
Abstract:
A pulsed UV laser assembly includes a partial reflector or beam splitter that divides each fundamental pulse into two sub-pulses and directs one sub-pulse to one end of a Bragg grating and the other pulse to the other end of the Bragg grating (or another Bragg grating) such that both sub-pulses are stretched and receive opposing (positive and negative) frequency chirps. The two stretched sub-pulses are combined to generate sum frequency light having a narrower bandwidth than could be obtained by second-harmonic generation directly from the fundamental. UV wavelengths may be generated directly from the sum frequency light or from a harmonic conversion scheme incorporating the sum frequency light. The UV laser may further incorporate other bandwidth reducing schemes. The pulsed UV laser may be used in an inspection or metrology system.
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Inventors:
Den Eugene
Chuan Yun-Ho Alex
Fielden John
Armstrong Joseph Jay
Dribbinski Bloody Mill
Chuan Yun-Ho Alex
Fielden John
Armstrong Joseph Jay
Dribbinski Bloody Mill
Application Number:
JP2017515085A
Publication Date:
October 28, 2020
Filing Date:
September 22, 2015
Export Citation:
Assignee:
KLA Corporation
International Classes:
G02F1/37; G01N21/84; G01N21/956; H01S3/00; H01S3/10
Domestic Patent References:
| JP10333194A |
Foreign References:
| US20130313440 | ||||
| US20130264481 |
Other References:
F.Raoult, et al.,Efficient generation of narrow-bandwidth picosecond pulses by frequency doubling of femtosecond chirped pulses,Optics letters,米国,The Optical Society of America,1998年 7月15日,第23巻、第14号,第1117-1119頁
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office
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