To form a dynamic zone width having high adjustable ratio by arranging a piezoelectric adjusting member for stimulating the dispersion of beam on a back surface of the adaptive mirror introducing a laser beam and a pressure transmitting device acted to the wide area of deformable surface of the adaptive mirror between the piezoelectric adjusting member and the back surface of the adaptive mirror.
This device 11 has a mirror housing 14 joined to the adaptive mirror 12 and the piezoelectric adjusting member 17 constituted as a piezoelectric actuator is arranged on a base board 18. The pressure transmitting device 19 provided with a pressure transmitting member 21 constituted as a pressure plunger, is arranged between the piezoelectric adjusting member 17 and adaptive mirror 12. A clamped flexible wall 22 and an intermediate body 23 of thin liquid film constituted as a pressure chamber, are arranged between the adaptive mirror 12 and the mirror housing 14. In this constitution, at the time of applying the voltage to the piezoelectric adjusting member 17, this member is deflected upward and the pressure transmitting member 21 is shifted upward and the partition wall 22 is shifted in the direction of the adaptive mirror 12 and an intermediate point 26 is deflected and this amplitude is made large.
GIESEN ADOLF
BEA MARTIN
HUGEL HELMUT
