To provide a laser beam irradiation apparatus capable of scribing a work with high productivity, and a laser beam scribing method using the laser beam irradiation apparatus.
The laser beam irradiation apparatus 100 comprises a laser beam source 101, a condensing lens 103 for condensing laser beams, a Z-axis slide mechanism 104 capable of moving the condensing lens 103 in the Z-axis direction, an X-axis slide part 108 and a Y-axis slide part 106 capable of moving a stage 105 with a substrate W placed thereon in a plane substantially orthogonal to the optical axis 101a, a lens control part 122 for controlling the Z-axis slide mechanism 104, a stage control part 123 for controlling the X-axis slide part 108 and the Y-axis slide part 106, and a main computer 120 for integrally controlling a laser beam control part 121, the lens control part 122 and the stage control part 123 with each other. By oscillating the condensing lens 103 in the Z-axis direction, the laser beam condensing area is oscillated in the thickness direction of the substrate W to irradiate laser beams.
UMETSU KAZUNARI
Fujitsuna Hideyoshi
Osamu Suzawa
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