Title:
LASER BEAM MACHINE AND ITS METHOD
Document Type and Number:
Japanese Patent JP3257413
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a laser beam machine and its method which are capable of highly accurate drilling for a multi-layer substrate by precisely detecting the drilling condition for an object to be machined and controlling the machining.
SOLUTION: For an object 10 which is successively provided with an intended area 12 and unintended area 13 for machining in the working direction with a laser beam 16, after the machined area is detected reaching the unintended area 13, a laser beam generator 1 is so controlled as the laser beam 16 is emitted to further impart a prescribed machining beam intensity.
Inventors:
Makoto Kato
Hidemi Takahashi
Hajime Oda
Isaji Kazuhide
Hidemi Takahashi
Hajime Oda
Isaji Kazuhide
Application Number:
JP23880096A
Publication Date:
February 18, 2002
Filing Date:
September 10, 1996
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01N21/47; B23K26/00; B23K26/02; B23K26/382; G02B27/00; H01S3/10; H05K3/00; H05K3/46; (IPC1-7): B23K26/00; B23K26/02; G01N21/47; G02B27/00; H01S3/10; H05K3/00; H05K3/46
Domestic Patent References:
| JP4361886A | ||||
| JP292482A | ||||
| JP445593A | ||||
| JP148691A | ||||
| JP5927791A | ||||
| JP2179376A | ||||
| JP5748316B2 |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)