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Title:
LASER BEAM MACHINE
Document Type and Number:
Japanese Patent JPH05228673
Kind Code:
A
Abstract:

PURPOSE: To provide a laser beam machine by which the correction of the deformation of fθ lens is performed, the moving speed is remarkably improved and the machine is greatly miniaturized.

CONSTITUTION: The machine is provided with a laser oscillator 1, a second reflection mirror 3 which is arranged on the optical axis of the laser beam and whose angle against the optical axis is changeable, a third reflection mirror 4 which is arranged as such that the rotary axis is provided at a twisted position rotated at right angle against the rotary axis of the second reflection mirror and whose angle is changeable, and the fθ lens 9 by which the laser beams reflected by the second and the third reflection mirrors are converged. In addition, on the optical axis between the laser oscillator and the fθ lens, a first reflection mirror 2 is arranged in a movable state while the angle of the first reflection mirror 2 against the incident beam is maintained, and the extent, speed and direction of the movement of this first reflection mirror are controlled.


Inventors:
KOYAMA HIROTAKA
Application Number:
JP3055292A
Publication Date:
September 07, 1993
Filing Date:
February 18, 1992
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B23K26/064; G02B26/10; G02B27/00; (IPC1-7): B23K26/06; G02B26/10; G02B27/00
Attorney, Agent or Firm:
Takehiko Suzue



 
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