To prevent degradation of the reliability and the yield of a work by the stuff scattered from the work produced when performing laser beam machining.
Plume which is heated and transpired from a work by laser beam is scattered in the laser beam incident direction. The plume is changed in the direction by the feed gas flow 16 from an inner port 14 side in an annular nozzle 11 and sucked by the exhaust gas flow 17 from the outer port 15 of the annular nozzle 11. Deposition of the plume on the work A12 is prevented thereby. Further, by the supply gas flow 16 inside the annular nozzle 11, degradation of the lens characteristic caused by arrival and deposition of the stuff scattered from the work A12 on a focusing lens A can be simultaneously prevented. A laser beam machining apparatus capable of realizing the consistent machining can thus be provided.
KITAOKA YUKI
Tomoyasu Sakaguchi
Hiroki Naito