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Title:
LASER BEAM MACHINING APPARATUS
Document Type and Number:
Japanese Patent JP2010167449
Kind Code:
A
Abstract:

To provide a laser beam machining apparatus which is capable of reducing cutting time and which has a simple structure.

This invention is related to an apparatus for cutting a semiconductor wafer (workpiece) by irradiating it with a laser beam, comprising a laser light source 10 for generating a laser beam and a condensing lens 12 for converging the laser beam on the semiconductor wafer. The condensing lens 12 includes two lens portions 12a, 12b arranged vertically to the optical axis L of the laser beam, wherein the two lens portions 12a, 12b each has a focal point different in height in the direction of the optical axis L. The condensing lens 12 consists of one lens in which the two lens portions 12a, 12b are integrally formed.


Inventors:
NOTANI YOSHIHIRO
ANDO NAOTO
Application Number:
JP2009012002A
Publication Date:
August 05, 2010
Filing Date:
January 22, 2009
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B23K26/00; B23K26/06; B23K26/38; G02B27/09; H01L21/301
Attorney, Agent or Firm:
Mamoru Takada
Hideki Takahashi