To provide a laser beam machining device by which a size of a light spot formed on a surface of a work object is maintained at a predetermined size when laser beam machining a surface of a work object of a shape of a cylinder pipe with a very small diameter.
To a work object OB of a shape of a cylinder pipe prolonged in an X-axis direction, a machining laser beam is irradiated to a Z-axis direction from a head 10 for work, a Z-axis direction laser beam for a servo is irradiated to a Z-axis direction from a Z-axis direction light head 20 for a servo, and a Y-axis direction laser beam for a servo is irradiated to a Y-axis direction from a Y-axis direction light head 30 for a servo. A deviation of an Y-axis direction of a work object OB is detected by a position of a projection of a work object OB projected on a photograph detector 118, and a deviation of an Z-axis direction of a work object OB is detected by a position of a projection of a work object OB projected on a photograph detector 402. An objective lens 112 is actuated based on a detected deviation.
TAMAYA MITSURU
IKETANI HIROBUMI
UJIIE MASAHIKO
| JP2010279953A | 2010-12-16 | |||
| JPH01150491A | 1989-06-13 | |||
| JPH0579900A | 1993-03-30 | |||
| JP2008030092A | 2008-02-14 | |||
| JP2003284783A | 2003-10-07 | |||
| JP2009172647A | 2009-08-06 | |||
| JP2010279953A | 2010-12-16 | |||
| JPH01150491A | 1989-06-13 | |||
| JPH0579900A | 1993-03-30 | |||
| JP2008030092A | 2008-02-14 | |||
| JP2003284783A | 2003-10-07 | |||
| JP2009172647A | 2009-08-06 |
Motohiko Hibino