To provide a laser beam machining method and a laser beam machining apparatus with which machining in a region where a laser beam is hardly reaches can be suitably performed and laser machining can be performed without causing a damage in a region where a laser beam easily reaches.
In the laser beam machining method and the laser beam machining apparatus, a laser beam from a laser light source is emitted to a plurality of arrayed workpieces and the periphery on a planar machining stage from a direction vertical to the surface, while scanning the irradiation position of the laser beam by an irradiation optical system, and the laser beam emitted by the irradiation optical system is reflected with a reflection member installed adjacently to each of the plurality of workpieces on the machining stage, and the side of the workpieces is irradiated. By irradiating the side of the workpieces with the laser beam reflected by the reflection member, since the side of the workpieces where the laser beam is hard to reach can be sufficiently irradiated with it without increasing the intensity, the laser beam machining can be suitably performed.
KAKUI MOTOKI
NAKAMAE KAZUO
| JP2007290013A | 2007-11-08 | |||
| JP2005211908A | 2005-08-11 | |||
| JPH08186918A | 1996-07-16 | |||
| JPS6471584A | 1989-03-16 | |||
| JPS63249413A | 1988-10-17 | |||
| JP2003002677A | 2003-01-08 | |||
| JPH0890273A | 1996-04-09 |
Shiro Terasaki
Yoshiki Kuroki
Ichira Kondo
Masatoshi Shibata