Title:
LASER BEAM MACHINING METHOD
Document Type and Number:
Japanese Patent JP2003088981
Kind Code:
A
Abstract:
To provide a laser beam machining method by which an unnecessary cleavage is not caused on the surface of a work and the surface is not melted.
The laser beam machining method comprises a process for heating a work 1 with a heating apparatus, a process for forming an intended cutting part based on a reformed region in the inside of the work 1 along the intended cutting line 5 of the work 1 by adjusting the focus of a converging point P in the inside of the heated work 1 and by irradiating the work 1 with a laser beam L, and a process for cutting the work 1 by cooling the work 1 in which the intended cutting part based on the reformed region is formed and thereby causing stress by thermal stress.
Inventors:
FUKUYO FUMITSUGU
FUKUMITSU KENJI
UCHIYAMA NAOKI
WAKUTA TOSHIMITSU
FUKUMITSU KENJI
UCHIYAMA NAOKI
WAKUTA TOSHIMITSU
Application Number:
JP2002094840A
Publication Date:
March 25, 2003
Filing Date:
September 12, 2001
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
B28D5/00; B23K26/046; B23K26/364; B23K26/38; B23K26/40; C03B33/09; H01L21/301; B23K101/40; (IPC1-7): B23K26/00; B23K26/04; B28D5/00; C03B33/09; H01L21/301
Attorney, Agent or Firm:
Yoshiki Hasegawa (2 outside)
Previous Patent: JP2003088976
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