Title:
レーザビーム整形装置
Document Type and Number:
Japanese Patent JP5343442
Kind Code:
B2
Inventors:
Roh Kenjin
Hideo Ebikawa
Hideo Ebikawa
Application Number:
JP2008202725A
Publication Date:
November 13, 2013
Filing Date:
August 06, 2008
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G02B27/09; G02B13/00; G02B21/00
Domestic Patent References:
| JP2006317508A | ||||
| JP2007121590A | ||||
| JP2008145463A | ||||
| JP2005148344A |