Title:
レーザ装置
Document Type and Number:
Japanese Patent JP7090135
Kind Code:
B2
Abstract:
Disclosed is a laser device including: a laser light source configured to emit laser light; a phase control unit configured to receive the laser light emitted from the laser light source, to control a spatial phase of a portion of the laser light, to emit the portion of the light as control light, and to emit another portion of the laser light as non-control light; a first optical system configured to irradiate an object with the control light emitted from the phase control unit; a detector configured to detect the non-control light emitted from the phase control unit; a second optical system configured to cause the non-control light emitted from the phase control unit to converge toward a detection surface of the detector; and a control unit configured to execute a correction process for controlling the phase control unit to correct a control state for a spatial phase of the control light in the phase control unit on the basis of a detection result for the non-control light from the detector.
Inventors:
Takashi Kurita
Ryo Yoshimura
Ryo Makino
Yu Takiguchi
Ryo Yoshimura
Ryo Makino
Yu Takiguchi
Application Number:
JP2020178067A
Publication Date:
June 23, 2022
Filing Date:
October 23, 2020
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G02F1/01; B23K26/064; G02F1/13
Domestic Patent References:
| JP2015226012A | ||||
| JP2015223620A | ||||
| JP2006119427A | ||||
| JP2020040072A | ||||
| JP2002540448A | ||||
| JP2009192832A | ||||
| JP2014095863A | ||||
| JP2005266585A | ||||
| JP2014026194A |
Foreign References:
| WO2013153371A1 |
Other References:
Satoshi Hasegawa, Yoshio Hayasaki, and Nobuo Nishida,"Holographic femtosecond laser processing with multiplexed phase Fresnel lenses",OPTICS LETTERS,2006年06月01日,Vol.31, No.11,pp.1705-1707
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama