PURPOSE: To provide a laser having a high spectral purity of output light and a high output by mounting one or more hole plates each having the same number of holes at predetermined position in a resonator, and mounting the hole plates so that optical axes passing the holes between all the plates coincide with a plurality of optical axes of the number of the holes.
CONSTITUTION: Hole plates 8, 9, 10, 11 having the same number of holes are mounted at predetermined positions in a laser resonator. In order to narrow the spectral width of an output light, the hole (d) must be reduced, and the output should be thus decreased. In case of K, F excimer lasers, an active region of approx. 10mm × 30mm is easily formed by discharging. Accordingly, a plurality of holes are formed at the hole plates to easily oscillate simultaneously at a plurality of optical axes. In this case, it is necessary to optimize the diameter and the interval of the hole so as not to reduce the spectral purity. The interval between the centers of the holes is set to W + 2di (where W is the extension of the optical beam at the position at a distance L from the hole, and di is the radius of the holel), thereby realizing an optimum configuration, i.e., a configuration in which the number of the axes is maximum.
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| WO/2003/041233 | MODULE FOR TUNING A LASER |
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KITAMURA MAMORU
YOSHIKAWA AKIRA
