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Title:
LASER-DRIVING LIGHT SOURCE DEVICE
Document Type and Number:
Japanese Patent JP2017220439
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser-driving light source device provided with a laser source, and a plasma container on which laser light from the laser source is condensed and made to be incident to generate plasma, in which excitation light emitted from the plasma container is inhibited from returning to the laser source once again, and the laser source is prevented from being damaged by being heated by returning excitation light.SOLUTION: In a laser-driving light source device, a filter which blocks excitation light from a plasma container is disposed between a laser source and a laser light condensing position inside the plasma container.SELECTED DRAWING: Figure 1

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Inventors:
NOZAKI SHINICHIRO
YOKOTA TOSHIO
ASAYAMA ATSUYA
Application Number:
JP2016152802A
Publication Date:
December 14, 2017
Filing Date:
August 03, 2016
Export Citation:
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Assignee:
USHIO ELECTRIC INC
International Classes:
H01J65/04; G03F7/20; H01J65/00
Domestic Patent References:
JPH11163789A1999-06-18
JP2013207004A2013-10-07
JP2010103104A2010-05-06
Foreign References:
WO2015055387A12015-04-23
WO2015086258A12015-06-18
Attorney, Agent or Firm:
Tsutomu Igarata



 
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