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Title:
LASER EXPAND OPTICAL SYSTEM, MANUFACTURING METHOD FOR OPTICAL ELEMENT, OPTICAL ELEMENT FORMING MOLD, AND OPTICAL ELEMENT
Document Type and Number:
Japanese Patent JP2013186338
Kind Code:
A
Abstract:

To provide a laser expand optical system capable of removing speckle, and simultaneously illuminating a wide area evenly without lowering a luminous intensity.

A laser expand optical system 1 includes: an input lens 2 for condensing injected laser beam L; and a pin-hole plate 4 having a pinhole 4a disposed in the vicinity of a focal position of the input lens 2. The laser expand optical system 1 has an output lens 6 which causes zero-order diffraction light L0 to be parallel light out of diffraction lights diffracted by the pin hole 4a. A focal distance of the input lens 2 is f, a diameter of the laser beam L is ΦL, a wavelength of the laser beam L is λ, and a diameter of the pin hole 4a is Φp. A diameter of the pin hole 4a is set to satisfy 2λf/ΦL≤Φp≤10[μm] under a condition of 0.067f/(f/ΦL)3<2.44λf/ΦL.


Inventors:
SAKAMOTO JUNICHI
Application Number:
JP2012052113A
Publication Date:
September 19, 2013
Filing Date:
March 08, 2012
Export Citation:
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Assignee:
CANON KK
International Classes:
G02B13/00; G02B19/00; H01L21/027
Attorney, Agent or Firm:
Kazuo Chikajima
Takashi Daejeon