Title:
レーザ加熱放電プラズマEUV光源
Document Type and Number:
Japanese Patent JP2011505668
Kind Code:
A
Abstract:
A self-magnetically confined lithium plasma which also may have an applied axial magnetic field is irradiated at sub-critical density by a carbon dioxide laser to generate extreme ultraviolet photons at the wavelength of 13.5 nm with high efficiency, high power and small source size.
Inventors:
McGuff, Malcolm, Double.
Application Number:
JP2010535995A
Publication Date:
February 24, 2011
Filing Date:
November 25, 2008
Export Citation:
Assignee:
PLEX LLC
International Classes:
H05G2/00; H01L21/027
Attorney, Agent or Firm:
Kiyoji Kuzuwa