Title:
LASER INTERFEROMETER AND METHOD FOR CONTROLLING LASER INTERFEROMETER
Document Type and Number:
Japanese Patent JP2022182317
Kind Code:
A
Abstract:
To provide a laser interferometer and its control method capable of accurately measuring information resulting from an object to be measured without depending on a type of laser light source.SOLUTION: A laser interferometer comprises: a laser light source that emits emission light; a light splitter that splits the emission light into first split light, and second split light incident on an object to be measured; a light modulator that is disposed on an optical path on which the first split light advances, and modulates the first split light into reference light having a different frequency; an optical path length change section that is provided between the light splitter and the light modulator, and changes a first optical path length which is an optical path length between the light splitter and the light modulator; a light receiving element that receives interference light of the reference light and object light generated by reflecting the emission light at the object to be measured, and outputs a light reception signal; and a control section that controls an operation of the optical path length change section in accordance with a second optical path length which is an optical path length between the light splitter and the object to be measured.SELECTED DRAWING: Figure 2
Inventors:
HAYASHI NOBUHITO
Application Number:
JP2021089819A
Publication Date:
December 08, 2022
Filing Date:
May 28, 2021
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01H9/00; G01B9/02; G01M99/00
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi
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