To provide a laser irradiation apparatus capable of emitting light having a stabilized intensity from a laser light source.
The laser irradiation apparatus comprises: a laser light source 1; a mirror 3 which reflects a part of light L1 emitted from the laser light source 1 and transmits the residue; a photodetector 4 which detects reflection light L2, L3 from the mirror 3; and a feedback control circuit 5 which receives a signal output from the photodetector 4 and controls the output of the laser light source 1 so as to maintain a constant signal strength. Thickness of the mirror 3 is set so that an interval S of a beam spot on the photodetector 4 of the reflection light L2 reflected on the front surface of the mirror 3 and a beam spot on the photodetector 4 of the reflection light L3 reflected on the back surface of the mirror 3 is equal to or greater than a predetermined value.
WO/2003/093801 | OPTICAL DETECTION AND ANALYSIS OF PARTICLES |
WO/1990/007705 | ARRANGEMENT FOR DETECTING METALLIC PARTICLES CARRIED BY A FLUID |
NAKABACHI HIDEYA
JPH1093166A | 1998-04-10 | |||
JPS526488A | 1977-01-18 | |||
JP2006080412A | 2006-03-23 | |||
JP2009501907A | 2009-01-22 |
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