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Patent Searching and Data


Title:
LASER IRRADIATION DEVICE AND MICROPARTICLE MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2012199359
Kind Code:
A
Abstract:

To provide a laser irradiation apparatus capable of emitting light having a stabilized intensity from a laser light source.

The laser irradiation apparatus comprises: a laser light source 1; a mirror 3 which reflects a part of light L1 emitted from the laser light source 1 and transmits the residue; a photodetector 4 which detects reflection light L2, L3 from the mirror 3; and a feedback control circuit 5 which receives a signal output from the photodetector 4 and controls the output of the laser light source 1 so as to maintain a constant signal strength. Thickness of the mirror 3 is set so that an interval S of a beam spot on the photodetector 4 of the reflection light L2 reflected on the front surface of the mirror 3 and a beam spot on the photodetector 4 of the reflection light L3 reflected on the back surface of the mirror 3 is equal to or greater than a predetermined value.


Inventors:
SEO KATSUHIRO
NAKABACHI HIDEYA
Application Number:
JP2011062129A
Publication Date:
October 18, 2012
Filing Date:
March 22, 2011
Export Citation:
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Assignee:
SONY CORP
International Classes:
G01N15/00; H01S3/13; H01S3/00
Domestic Patent References:
JPH1093166A1998-04-10
JPS526488A1977-01-18
JP2006080412A2006-03-23
JP2009501907A2009-01-22
Attorney, Agent or Firm:
渡邊 薫