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Title:
LASER IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2013105943
Kind Code:
A
Abstract:

To provide a laser irradiation device that can suppress a cost increase in a cylindrical lens even if a beam cross-section becomes long.

A plurality of laser emission surfaces are arranged in the X and Y directions which are orthogonal to each other, and emit laser beams in the Z direction. A first cylindrical lens is arranged correspondingly along the line of the laser emission surfaces arranged in the X direction. The first cylindrical lens makes the laser beams emitted from the laser emission surfaces into a parallel ray bundle in the YZ plane. The plurality of laser beams having transmitted through the first cylindrical lens go into a second cylindrical lens. The second cylindrical lens overlaps the plurality of laser beams on a long region which is long in the X direction. The second cylindrical lens includes a plurality of optical members arranged in the X direction. Each of the optical members includes a column surface comprised of bus lines parallel to the X direction and a mirror polished end surface vertical to the X direction. The end surfaces of optical members neighboring each other closely contact with each other.


Inventors:
SHUDO KAZUMASA
Application Number:
JP2011249702A
Publication Date:
May 30, 2013
Filing Date:
November 15, 2011
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
H01L21/268; B23K26/073; H01L21/20
Domestic Patent References:
JP2008177372A2008-07-31
JP2003289052A2003-10-10
JPH026918A1990-01-11
JPH09184997A1997-07-15
JP2008524662A2008-07-10
JP2008147428A2008-06-26
JPH01164917A1989-06-29
JP2000323428A2000-11-24
JPH04127115A1992-04-28
JP2008177372A2008-07-31
JP2003289052A2003-10-10
JPH026918A1990-01-11
JPH09184997A1997-07-15
JP2008524662A2008-07-10
Foreign References:
US4962983A1990-10-16
US6393042B12002-05-21
US20060209310A12006-09-21
US6393042B12002-05-21
US20060209310A12006-09-21
US4962983A1990-10-16
Attorney, Agent or Firm:
Mikio Kuruyama
Keishiro Takahashi
Ukai Shinichi



 
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