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Title:
LASER LENGTH MEASURING MACHINE, AND ORIGINAL OPTICAL DISK EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2005274550
Kind Code:
A
Abstract:

To provide a laser length measuring machine capable of precisely measuring displacement of a curved surface such as a cylindrical side surface by minimizing the influence of fine irregularities of a measuring surface and eliminating the influence of a relatively large flaw locally existing in the measuring surface.

This length measuring machine comprises a beam dividing means 100, an interferometer 2 dividing a divided laser beam to a first beam and a second beam and composing the first beam reflected by a reference mirror 3 and returned therefrom with the second beam reflected by a measuring object 5 and returned therefrom; an objective lens optical system 4; a condenser lens 110 converging interference light emitted from the interferometer 2; a light detector 6, and a length measuring circuit 7. Further, a beam interruption means 120 interrupting an optional part of the divided first beam or second beam is provided between the beam dividing means 100 and the interferometer 2.


Inventors:
MIYATA HIROYUKI
Application Number:
JP2004157444A
Publication Date:
October 06, 2005
Filing Date:
May 27, 2004
Export Citation:
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Assignee:
RICOH KK
International Classes:
G01B9/02; G01B11/00; G11B7/26; (IPC1-7): G01B11/00; G01B9/02; G11B7/26
Attorney, Agent or Firm:
Chieko Tateno