Title:
レーザ加工機およびウインドセル
Document Type and Number:
Japanese Patent JP4641276
Kind Code:
B2
Abstract:
A laser processing device and a window cell are provided to decrease cleaning time as the window cell is not required to be separated and to prevent damage to the window cell when handling the window cell. A laser processing device comprises a window cel1 (20) and a cleaning unit (A). The window cell is positioned at a side of a process material for a light collecting lenses. The cleaning unit is positioned at an XY table to clean the surface of the window cell. The cleaning unit is formed at the position spaced from the window cell to process the process material by a laser beam. The cleaning unit is contacted with the window cell to clean the window cell. A base material of the window cell is germanium, and the surface of the window cell facing the process material is DLC (diamond-like-carbon)-coated.
Inventors:
Mitsuru Masuda
Yasushi Ito
Yasushi Ito
Application Number:
JP2006096066A
Publication Date:
March 02, 2011
Filing Date:
March 30, 2006
Export Citation:
Assignee:
Hitachi Via Mechanics, Ltd.
International Classes:
B23K26/16; H01S3/00
Domestic Patent References:
| JP3047692A | ||||
| JP57145644U | ||||
| JP2004361862A | ||||
| JP2004314128A |
Attorney, Agent or Firm:
Kazuo Chikajima