Title:
LASER MARKING DEVICE
Document Type and Number:
Japanese Patent JPH05237673
Kind Code:
A
Abstract:
PURPOSE: To enable the marking operation of another kind without degrading the appearance in edge parts after marking and without an operation for replacing a mask.
CONSTITUTION: A laser beam oscillated from a pulse laser oscillator 1 is enlarged by an optical system 2 for beam shaping to such a size at which the laser beam transmission part of the mask 5 is covered by several tens shots. This beam is set in an arbitrary position on the mask 5 by a galvanometer 3 for selecting the mask and a collimator lens 4. The laser beam masked by the mask 5 is set and irradiated to the processing position on a processing surface 9 by a galvanometer 6 for positioning and an objective lens 7.
Inventors:
SHINOZUKA YUKIYOSHI
Application Number:
JP7627692A
Publication Date:
September 17, 1993
Filing Date:
February 27, 1992
Export Citation:
Assignee:
NEC CORP
International Classes:
B23K26/00; B23K26/066; B41J2/00; B41J2/44; B41M5/24; G02B26/10; H01H11/00; (IPC1-7): B23K26/00; B23K26/06; B41J2/44; B41M5/24; G02B26/10
Attorney, Agent or Firm:
Yanagi Kawa Shin