To effectively reduce the occurrence of measurement errors due to thermal expansion.
An optical component which is to give relatively large adverse effects on measurement accuracy, when positional relation varies, is mounted on a board 100, made of an alloy by using low thermal expansion, such as Invar (R) or super Invar. The board 100 with the optical component mounted is assembled with a base 200, that has other components accommodated and mounted thereon. Here, the board 100 is formed, accommodated in a dent 201 provided to the upper surface of the base 200, with two points at an end of the -y direction which is screw-fastened to the base 200 with two board fixing screws 101, and has an end in the y direction sandwiched in between a base-pressing board 102, mounted on the base 200 with two pressing board fixing screws 103 and the base 200 from above and below, and is assembled on the base 200, with the dent 201 that is formed slightly larger than the board 100 so that an end side face of the board 100 so that will not contact the base 200.
FUNATSU HIROAKI
OSHIMA RYOTA
| JPH06300617A | 1994-10-28 | |||
| JPH07111351A | 1995-04-25 | |||
| JP2005069916A | 2005-03-17 | |||
| JPH02259512A | 1990-10-22 | |||
| JPH0953910A | 1997-02-25 | |||
| JP2002210771A | 2002-07-30 |