Title:
LASER MEASURING METHOD AND MEASURING STYLUS
Document Type and Number:
Japanese Patent JPH07167620
Kind Code:
A
Abstract:
PURPOSE: To realize highly accurate displacement measurement without any influence due to the deformation of measuring stylus even when the measuring stylus is constructed of an inexpensive material.
CONSTITUTION: A measuring stylus 10 is kept movable by an air static pressure bearing 6. The stylus 10 is made hollow, and a contact ball 2 is fitted on the one end thereof by a fitting member 7, then a reflection mirror 4 is placed in the inside of the member 7. A laser light 5 for measuring length is led into the inside of the stylus 10 and it is reflected on a reflection mirror 4.
More Like This:
Inventors:
SHIOZAWA HISASHI
Application Number:
JP34123693A
Publication Date:
July 04, 1995
Filing Date:
December 13, 1993
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01B9/02; G01B11/02; G01B11/24; (IPC1-7): G01B11/02; G01B9/02; G01B11/24
Attorney, Agent or Firm:
Masaki Yamakawa