Title:
LASER PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2014231062
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To allow an object lens attached to a collector to be cleaned without occurrence of failure of an actuator.SOLUTION: A laser processing device 1 comprises: holding means 10 for holding a workpiece; laser beam radiation means 40 for radiating laser beam in a wavelength having transparency with respect to the workpiece W; measurement means 50 for measuring surface displacement of a laser beam radiation area of the workpiece W; and light focus point position adjustment means 60 for adjusting a light focus point position of the laser beam based on the measurement result of the measurement means 50. In a maintenance mode for performing cleaning and the like of an object lens 46 of a collector 45, by control of control means 62 constituting the light focus point position adjustment means 60, energization to an actuator 61 is automatically blocked. Therefore, even the collector 45 is moved vertically with the object lens 46 during cleaning of the object lens 46, no failure occurs to the actuator 61.
Inventors:
KISE TAIZO
NOMURA HIROSHI
NOMURA HIROSHI
Application Number:
JP2013111731A
Publication Date:
December 11, 2014
Filing Date:
May 28, 2013
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23K26/00; B23K26/046; H01L21/301
Domestic Patent References:
| JP2004141979A | 2004-05-20 | |||
| JP2006246581A | 2006-09-14 | |||
| JP2010052014A | 2010-03-11 |
Attorney, Agent or Firm:
Kyoko Kawamura
Isao Sasaki
Ken Kubo
Isao Sasaki
Ken Kubo
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