Title:
LASER PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2015123483
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To change an interval between a plurality of laser beams in a laser processing device.SOLUTION: The laser processing device radiates the plurality of laser beams to a substrate to process it. The device includes: a work table 2 on which the substrate is placed; a laser beam output part 15 for outputting a laser beam; and an optical branching/condensing mechanism that causes the laser beam from the laser beam output part 15 to branch into the plurality of laser beams to condense the laser beams on a workpiece. The optical branching/condensing mechanism includes an interval adjustment mechanism for changing the interval between two branching laser beams.
Inventors:
HAYASHI NAOHISA
SHIMIZU SEIJI
TANAKA TEPPEI
SHIMIZU SEIJI
TANAKA TEPPEI
Application Number:
JP2013270928A
Publication Date:
July 06, 2015
Filing Date:
December 27, 2013
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
B23K26/067; B23K26/064
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