Title:
レーザ加工装置、及び、動作確認方法
Document Type and Number:
Japanese Patent JP6768444
Kind Code:
B2
Abstract:
There is provided a laser processing device that includes a laser light source configured to output laser light, a spatial light modulator configured to modulate the laser light output from the laser light source according to a phase pattern and emit the modulated laser light, an objective lens configured to converge the laser light emitted from the spatial light modulator onto an object, a controller configured to control a phase pattern to be displayed on the spatial light modulator, and a determiner configured to determine whether operation of the spatial light modulator is normal, in which the controller performs switching control in which the phase pattern to be displayed on the spatial light modulator is switched, and the determiner makes the determination on the basis of a change in intensity of the laser light emitted from the spatial light modulator between before the switching control and after the switching control.
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Inventors:
Yasunori Igasaki
Application Number:
JP2016202601A
Publication Date:
October 14, 2020
Filing Date:
October 14, 2016
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
B23K26/00; B23K26/062
Domestic Patent References:
| JP2014138956A | ||||
| JP201151011A |
Foreign References:
| WO2013153371A1 | ||||
| WO2015159687A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama