Title:
レーザ加工方法及びレーザ加工装置
Document Type and Number:
Japanese Patent JP5322418
Kind Code:
B2
Inventors:
Takeshi Sakamoto
Application Number:
JP2007242846A
Publication Date:
October 23, 2013
Filing Date:
September 19, 2007
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01L21/301; B23K26/00; B23K26/064; B23K26/38; B23K26/40; B28D5/00; B23K101/40
Domestic Patent References:
| JP2007141995A | ||||
| JP2002205180A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Kenichi Shibayama
Shiro Terasaki
Satoru Ishida
Kenichi Shibayama