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Title:
LASER RAMAN MICROPROBE
Document Type and Number:
Japanese Patent JPS59107243
Kind Code:
A
Abstract:

PURPOSE: To monitor always the state of a sample to be measured without damaging the detection sensitivity of the sample even if the wavelength of a Raman scattered light exciting laser light is changed, by selecting a transmission wavelength position of a variable wavelength narrow-band band pass filter.

CONSTITUTION: A Raman scattered light exciting laser light 1 set to an optional wavelength is refracted at 90° by a semitransparent mirror 3 and passes through an object lens 4 and is focused on a sample 5. The laser reflected light 6 and Raman scattered light 7 generated from the sample 5 pass through the object lens 4 and the semitransparent mirror 3 and is made incident to a variable wavelength narrow-band band pass filter 8. By selecting the position in the diameter direction of the filter 8, only the laser reflected light 6 set to an optional wavelength is transmitted through the filter 8 and reaches a microscopic image monitor 13. On the other hand, the Raman scattered light 7 having a difference wavelength is reflected at 90° to the optical axis and is focused on a spectrophotometer incidence slit 15 through a condenser lens 14.


Inventors:
TOCHIGI KENJI
HANIYUU YOSHIAKI
HIRATSUKA YUTAKA
Application Number:
JP21540482A
Publication Date:
June 21, 1984
Filing Date:
December 10, 1982
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01N21/65; (IPC1-7): G01N21/65
Attorney, Agent or Firm:
Toshiyuki Usuda



 
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