To solve a problem in which, after laser beam irradiation, mist sprayed on the surface of a substrate to be cut sometimes remains unvaporized, in performing laser scribing process by a laser scribing apparatus.

As a method of leaving no residual mist, optimization of process conditions is cited such as a laser power, mist quantity, mist grain size, and stage speed. As a method other than the optimization of these process conditions, there is installed a shield mask for limiting the spraying area of the mist from a nozzle.