LASER SYSTEM, EXPOSURE DEVICE AND EXCIMER LASER

Title:

LASER SYSTEM, EXPOSURE DEVICE AND EXCIMER LASER

Document Type and Number:

Japanese Patent JPH0629591

Kind Code:

A

Abstract:

PURPOSE: To reduce an installation space and a cost of a system by simplifying the system.

CONSTITUTION: A laser system has a plurality of lasers 2a-2c necessary for a vacuum evacuation unit for operating a laser oscillator. One vacuum evacuation unit 4 is used commonly for the plurality of the lasers to evacuate the lasers. The evacuations are controlled by communicating with the lasers by a controller.

Inventors:

SANO NAOTO
YASUFUKU YUJI
OOUCHI CHIGUSA

Application Number:

JP20428492A

Publication Date:

February 04, 1994

Filing Date:

July 09, 1992

Export Citation:

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Assignee:

CANON KK

International Classes:

G03F7/20; H01L21/027; H01L21/30; H01S3/036; H01S3/104; H01S3/134; (IPC1-7): H01S3/036; G03F7/20; H01L21/027; H01S3/104; H01S3/134

Attorney, Agent or Firm:

Tetsuya Ito (1 outside)

Next Patent: DISCHARGE-PUMPED LASER